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Agilent 4083A DC/RF Parametric Test System (Pre-Owned)

Agilent 4083A DC/RF Parametric Test System (Pre-Owned)

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Agilent 4083A DC/RF Parametric Test System (Pre-Owned)

Key Features At A Glance

  • DC measurement, capacitance, Flash cell test, RF S-parameter and RFCV measurement in a single integrated platform
  • Supports up to eight Source Monitor Units (SMUs); each SMU self-calibrating and individually configurable
  • Fully guarded switching matrix customizable from 12 to 48 pins, plus dedicated chuck connection pin
  • Two RF input ports and test head RF docking interface with up to 10 RF output ports for measurements DC to 20 GHz
  • Optional 8 x 10 RF matrix and supported Agilent PNA network analyzer for S-parameter and RFCV measurement
  • Optional High-Speed CMU for capacitance/impedance measurement from 1 kHz to 2 MHz, range 1 fF to 100 nF
  • Optional high-voltage semiconductor pulse generator unit (HV-SPGU) supporting 2-level and 3-level pulses to ±40 V
  • SEMI-compliant automation via SPECS-FA software (SECS II, GEM, CMS, OSS, PMS, STS, CJM)
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The Agilent 4083A DC/RF Parametric Test System is designed to perform fast and precise DC measurements, capacitance measurements, Flash cell test, high frequency applications such as ring oscillator measurement, and RF S-parameter and RFCV measurement. As a pre-owned parametric test platform from Valuetronics, the 4083A integrates DC sourcing and measurement, capacitance characterization, and RF measurement capability into a single test head with a fully guarded switching matrix that scales from 12 to 48 measurement pins plus a dedicated chuck connection.

The 4083A serves semiconductor process evaluation and parametric test applications including Flash cell test, ring oscillator measurement, RF S-parameter characterization, and RFCV measurement. It supports up to eight Source Monitor Units that can be individually configured to force either current or voltage while simultaneously measuring either current or voltage. The system can be constructed in either a low-current or an ultra low-current configuration depending on the matrix card specified, with only ultra low-current configurations supporting the High-Resolution SMU (HRSMU).

ValueTronics is a U.S.-based test and measurement specialist headquartered in our 20,000 sq ft secure warehouse at 1675 Cambridge Drive, Elgin, Illinois. Since 1992, we have built our reputation on professionally inspecting, testing, and grading every instrument before it leaves our facility — including complex parametric test platforms like the 4083A. Unlike drop-shippers or pass-through brokers, we hold inventory in-house, which means condition is verified by our technicians rather than described by a prior owner.

Brand Heritage

Hewlett-Packard's test and measurement business was spun out as Agilent Technologies in 1999. In 2014, Agilent's electronic measurement business was transferred to Keysight Technologies, while Agilent retained its life sciences and chemical analysis businesses. Instruments bearing the Agilent brand name in semiconductor parametric test, such as the 4083A, are part of this lineage.

Product Core & Specifications

Specification Value
General Description
Supported SMUs Up to 8 Source Monitor Units
Switching Matrix Pins 12 to 48 DUT pins (configurable), plus one dedicated chuck connection pin
Matrix Card Types Standard low-current or ultra low-current
RF Input Ports (Test Head) 2
RF Output Ports (Test Head) Up to 10
Ground Unit (GNDU) 1, ±1.6 A
Switching Matrix Subsystem
Maximum DUT Pins 48 output pins plus one pin for prober chuck connection (triaxial connector)
SMU Ports in Testhead 2 ports for low-current measurement (Non-Kelvin); 4 ports (Kelvin); 2 ports (Non-Kelvin); 1 port for GNDU (Kelvin)
Auxiliary (AUX) Ports 6 for external instruments + 2 for HS-CMU or E4980A
Extended Paths 48 (one on/off relay per path)
Optional High Frequency (HF) Ports 6
Maximum Voltage — SMU Port in Test Head ±200 V
Maximum Voltage — AUX Ports 1 and 2 ±200 V
Maximum Voltage — AUX Ports 3 to 8 ±100 V
Maximum Voltage — Optional HF Ports ±100 V (between force and common); ±100 V (between two of forces of all HF ports); ±100 V (between any HF port force and any extended path force)
Maximum Voltage — Extended Path ±100 V
Zero Reference ±200 mV
Maximum Current — SMU Port in Test Head ±1.0 A
Maximum Current — GNDU ±1.6 A
Maximum Current — AUX Port ±1.0 A
Maximum Current — Optional HF Port ±0.5 A
Maximum Current — Extended Path ±0.5 A
Maximum Residual Resistance — Low Current Port Force 1.0 Ω
Maximum Residual Resistance — Kelvin Port Force 1.0 Ω, Sense 2.5 Ω
Maximum Residual Resistance — Non-Kelvin Port Force 1.0 Ω
Maximum Residual Resistance — Optional HF Port 2.0 Ω (supplemental)
Maximum Stray Capacitance between DUT Pins 3 pF (supplemental)
Isolation Resistance — Low Current with Guard 1×10¹⁵ Ω (supplemental)
Optional HF Port Bandwidth (@−3dB) 60 MHz (50 Ω load, 3 × 24 configuration, supplemental)
Optional HF Port Cross Talk Between Pins ±2% (5 kΩ load, 20 ns pulse transition time, supplemental)
Optional Pulse Switch
Number of Blocks 2
Block 1 Switches 3 relays (make or break, selectable) + 1 transfer-type relay
Block 2 Switches 1 make-or-break relay + 2 transfer-type relays
Control Input Ports One per block (PSC1, PSC2)
Maximum Voltage ±40 V (between force and common of each switch)
Maximum Current ±0.4 A (input to output)
Residual Resistance (IN to OUT) Nominal 1.5 Ω (supplemental)
OFF Capacitance (IN to OUT) 50 pF (Vin−Vout = 0 V, supplemental)
Operating Time of Switching Max. 500 µs (supplemental)
DC Measurement — SMU Voltage
SMU Types HRSMU (High Resolution), MPSMU (Medium Power), HPSMU (High Power)
Voltage Range — MPSMU ±2 V, ±20 V, ±40 V, ±100 V
Voltage Range — HPSMU Up to ±200 V
Voltage Range — HRSMU ±2 V, ±20 V, ±40 V, ±100 V
Voltage Force Resolution 100 µV (±2 V range) to 10 mV (±200 V range)
Voltage Measure Resolution (Precision) 2 µV (±2 V range) to 200 µV (±200 V range)
DC Measurement — SMU Current
Current Range — HPSMU 10 fA to 1 A
Current Range — MPSMU 10 fA to 100 mA
Current Range — HRSMU 1 fA to 100 mA
Maximum Capacitive Load ≤1000 pF
Maximum Allowable Guard Capacitance 250 pF (between signal line and guard line outside of matrix)
Maximum Slew Rate 0.2 V/µs
Current Compliance Setting Range 1 pA to maximum current
Ground Unit (GNDU)
Output Voltage 0 V
Maximum Current ±1.6 A
Offset Voltage ±200 µV
Maximum Capacitance Load 1 µF (supplemental)
Digital Voltmeter (Agilent 3458A)
Voltage Measurement Range — 0.1 V Resolution 0.1 µV; Accuracy 0.01% + 100 µV
Voltage Measurement Range — 1 V Resolution 1 µV; Accuracy 0.01% + 100 µV
Voltage Measurement Range — 10 V Resolution 10 µV; Accuracy 0.01% + 200 µV
Voltage Measurement Range — 100 V Resolution 100 µV; Accuracy 0.02% + 1 mV
Capacitance Measurement — High-Speed CMU
Measurement Range (1 MHz) 1 fF to 1.2 nF; 10 nS to 7.5 mS
Measurement Range (100 kHz) 1 fF to 10 nF; 1 nS to 6.3 mS
Measurement Range (10 kHz) 1 fF to 100 nF; 0.1 nS to 6.3 mS
Measurement Range (1 kHz) 10 fF to 100 nF; 0.1 nS to 63 mS
Measurement Frequency Setting range 1 kHz to 2 MHz (34 points)
Test Signal Level 10 mV, 30 mV, 50 mV, 100 mV
DC Bias Full-Scale Voltage Range ±10 V
DC Bias Setting Resolution 1 mV
DC Bias Force Accuracy ±(0.1% of setting + 10 mV)
Capacitance Measurement — Agilent E4980A LCR Meter
Measurement Range (1 MHz) 1 fF to 1.2 nF; 10 nS to 7.5 mS
Measurement Range (100 kHz) 1 fF to 10 nF; 1 nS to 6.3 mS
Measurement Range (10 kHz) 1 fF to 100 nF; 0.1 nS to 6.3 mS
Measurement Range (1 kHz) 10 fF to 100 nF; 0.1 nS to 0.63 mS
Measurement Frequencies 1 kHz, 10 kHz, 100 kHz, 1 MHz
DC Bias Voltage ±40 V
DC Bias Force Accuracy (±40 V range) 0.1% + 10 mV
Test Signal Level 30 mV (rms)
Measurement Speed MEDIUM or LONG
Optional Pulse Force Unit (HV-SPGU)
Maximum Installable HV-SPGU Modules 5
Channels per HV-SPGU Module 2
Important: Accuracy is specified at 23°C ± 5°C, 15% to 70% RH, at least 60 minutes warm up, within one hour after self-calibration, and Medium or Long integration time. For SMU current ranges less than or equal to 1 nA, integration time must be Long (16 PLC or longer).Important: The 4083A requires special prober functionality to perform RF measurements. Please contact your prober vendor to obtain the proper prober configuration when making RF measurements with the 4083A.Important: When making RF measurements, the RF docking interface may strike your existing probe card if the card has a handle or plate that exceeds the allowable dimensions. Please contact your local sales representative regarding this issue.Important: Only 4083A configurations containing the ultra low-current matrix cards can use the high-resolution SMU (HRSMU).Important: Probe cards and auto probers (TEL P12XL/Precio, ACCRETECH UF3000/UF3000EX, JEM, MJC, SV Probe, FormFactor, CMI, GGB) are not included with the base 4083A system and must be specified separately based on the measurement requirements.Important: Current measurement accuracy of the SMU may be affected by electromagnetic field strength over 3 V/m at a frequency of 26 MHz to 1 GHz.Important: For ultra-low current and low voltage measurements, additional environmental conditions are recommended: temperature within ±1°C after calibration, humidity ≤50%, floor vibration ≤1 mG at ≥10 Hz, air cleanliness ≤class 10,000, and line voltage burst/surge noise ≤1 kV.Recommended pairing: the 4083A supports the Agilent E8362B PNA Series Network Analyzer for RF S-parameter and RFCV measurement from 10 MHz to 20 GHz, with up to two RF ports.

About this used unit

  • Warranty included
  • Functional verification included
  • Standard Calibration Upgrade Options: No Calibration Required, NIST Traceable, Z540.1 or ISO 17025 with Data, Z540.3 Guardbanding with Data.
  • Note that unnecessary accessories may not be included (contact Test Architect to confirm).

Please review the Manufacturer's Data Sheet to verify published specifications. Feedback on this webpage is always welcome — please reach out to your Test Architect at any time for questions or concerns. Thank you, we truly appreciate you being our customer.

Model No

Agilent

Condition

Used

Manufacturer

Agilent