4083A Agilent Switch Mainframe Used

DC Measurements

• Spot, Sweep, Pulse Bias, and Pulse Sweep.
• Measurement unit:
• HRSMU (High Resolution SMU), (Can be used only with ultra-low current matrix cards) MPSMU (Medium Power SMU and HPSMU (High Power SMU)
• Measurement range: 1 fA (Using HRSMU. Using MPSMU, 10 fA to 100 mA, 2 μV to 100 V) to 100 mA, 2 μV to 100 V (using the two low current SMU ports) 10 fA to 1 A (Using optional HPSMU. Using MPSMU, 10 fA to 100 mA, 2 μV to 100 V), 2 μV to 200 V (Using optional HPSMU. Using MPSMU, 10 fA to 100 mA, 2 μV to 100 V), (using the 6 standard SMU ports)

Capacitance/Conductance Measurement Using Optional HS-CMU

• C/G, C/G -V, C/G -V/f
• Measurement unit:
• High Speed Capacitance Measurement Unit (HS-CMU)
• Measurement Frequencies:
• 1 kHz - 2 MHz, 34 points
• Measurement range:
• 1 fF to 100 nF, 0.1 nS to 7.5 mS
• DC Bias Voltage: ±10 V

Impedance Measurements Using Optional HS-CMU

• Z/PHASE and Z/PHASE - f
• Measurement unit: HS-CMU
• Measurement Frequencies:
• 1 kHz - 2 MHz, 34 points
• DC Bias Voltage: ±10 V

Capacitance/Conductance Measurements Using Optional Agilent E4980A LCR Meter

• Measurements: C/G and C/G-V
• Measurement unit: Agilent E4980A LCR Meter
• Measurement Frequency: 1 kHz, 10 kHz, 100 kHz, and 1 MHz
• Measurement range: 1 fF to 100 nF, 0.1 nS to 7.5 mS
• DC Bias Voltage: ±40 V

Two Terminal Differential Voltage Measurements

• Measurement Unit: Agilent 3458A
• Measurement range: 0.1 μV to 100 V (only when using ultralow-current matrix cards), or 1 μV to 100 V

High-Frequency Pulse Force Option

• The 4083A cabinet supports an optional high-voltage semiconductor pulse generator unit (HVSPGU) mainframe that contains the SPGU modules.
• Maximum number of installable HV-SPGU modules: 5
• Number of channels per HV-SPGU: 2
• Pulse level support: Each HV-SPGU channel supports 2- level and 3-level pulses
• Pulse Level (at open load): ±40 V (at 2-level and 3-level)
• Pulse Period (at 50 Ω load): 350 ns to 10 s with 10 ns resolution
• Pulse Width (at 50 Ω load): 50 ns to [Period − 50 ns] with 2.5 ns or 10 ns resolution
• Pulse Delay (at 50 Ω load): 0 s to [Period − 75 ns] with 2.5 ns or 10 ns resolution
• Transition Time Setting Range (at 50 Ω load): 20 ns to 400 ms with 2 ns or 8 ns resolution
• Transition Time Minimum (at 50 Ω load): 20 ns, 30 ns

Switching Matrix Measurement Pins

• Between 12 and 48 pins Note: One additional pin is dedicated for the prober chuck connection.

Switching Matrix Instrument Ports

• Up to eight SMUs
• One ground unit (GNDU)
• Eight auxiliary (AUX) ports (Two ports are used for HS-CMU)
• 48 extended paths
• Six optional high-frequency (HF) ports and pulse switch input/ output ports

Test Head RF Measurement Ports

• Up to 10

RF 20 GHz S-Parameter Measurements

• Supported network analyzer: Agilent E8362B PNA Series
• Network Analyzer Test Frequencies: 10 MHz to 20 GHz (E8362B)

RF Matrix Option

• Number of Input Ports: 8
• Number of Output Ports: 10
• Frequency Range: DC to 20 GHz

Maximum DUT Pins

• 48 output pins plus one pin for the prober chuck connection (triaxial connector). Two types of DC switching matrix cards are available: standard low-current and ultra low-current.

Maximum Number of Instrument Ports

• SMU Ports in Test head (Eight SMUs + one GNDU):
• Two ports for low-current measurement (Non-Kelvin)
• Four ports (Kelvin)
• Two ports (Non-Kelvin)
• One port for GNDU (Kelvin)

Auxiliary (AUX) ports:

• Six for external instruments (Digital voltmeter, etc.) and two for HS-CMU or E4980A
• 2 triaxial input ports (Force/Guard/Common, AUX ports 1 and 2)
• Four BNC two-pair input ports (Force/Common and Sense/ Common, AUX ports 3 to 6)
• Two BNC input ports (Force/ Common, AUX ports 7 and 8, connected to HSCMU in default)
• Extended path: 48 extended paths – The system provides one on/off relay for each path.

Optional High Frequency (HF) ports:

• Six for external instruments.
• HF ports 1 through 3 can access measurement pins 1 through 24, and HF ports 4 through 6 can access measurement pins 25 through 48. The user has the option of connecting any of the following HF port pairs together via a 1 TO 2 cable in order to access all (1 through 48) measurement pins: HF ports 1 and 4, HF ports 2 and 5, and HF ports 3 and 6.

Maximum Voltage at Each Port

• SMU port in Test Head: ±200 V AUX port:
• ±200 V (AUX ports 1 and 2)
• ±100 V (AUX ports 3 to 8)

Optional HF ports:

• ±100 V (between force and common of each HF port)
• ±100 V (between two of forces of all HF ports)
• ±100 V (between any force of HF ports and any force of extended paths)

Extended path:

• ±100 V (between force and common of each extended path)
• ±100 V (between any force of the optional HF ports and any force of extended paths)
• Zero reference: ±200 mV

Maximum Current, Port to DUT Pin

• SMU port in Test Head: ±1.0 A
• GNDU: ±1.6 A
• AUX port: ±1.0 A
• Optional HF port: ±0.5 A
• Extended path: ±0.5 A

Maximum Residual Resistance

• Through AUX port
• Low current port: Force 1.0 Ω
• Kelvin port: Force 1.0; Sense 2.5 Ω
• Non-Kelvin port: Force 1.0 Ω
• Through optional HF port (supplemental characteristics): 2.0 Ω

Maximum Stray Capacitance between DUT Pins (supplemental characteristics)

• 3 pF

Isolation Resistance (supplemental characteristics)

• Low Current (with Guard): 1× 10.15 Ω

The Agilent 4083A DC/RF Parametric Test System is designed to perform fast and precise DC measurements, capacitance measurements, Flash cell test, high frequency applications such as ring oscillator measurement, and RF S-parameter and RFCV measurement.

The system supports up to eight Source Monitor Units (SMUs). Each SMU is self-calibrating, and can be individually configured to force either current or voltage, as well as simultaneously measure either current or voltage. The system also supports a fully guarded switching matrix customizable from 12 to 48 pins. One special additional pin is dedicated as a chuck connection.

The 4083A can be constructed in either a low-current or an ultra low-current configuration, depending upon the type of matrix card specified. Only 4083A models containing the ultra low-current matrix cards can use the high-resolution SMU (HRSMU).

The 4083A comes with two RF input ports and the test head has an RF docking interface with 10 RF output ports. An optional 8 x 10 RF matrix is available and measurements from DC to 20 GHz are also possible. The system hardware and software support an Agilent PNA network analyzer for making S-parameter and RFCV measurements. The system software supplies an automatic and interactive calibration tool that enables full two-port SOLT and one-port SOL, and open/short de-embedding for RF measurement.

An optional High-Speed Capacitance Measurement Unit (HS-CMU) is available for the 4083A, which enables the measurement of capacitance and impedance with unprecedented speed. External instruments can be integrated into the system via six auxiliary input ports or forty-eight extended path inputs. The extended path inputs allow the user to connect external signals directly to the DUT pins.

Another 4083A option is a high frequency switching matrix with optional integrated semiconductor pulse generator unit control. The high-frequency matrix is organized as two 3 x 24 matrices (six inputs total), and 1 TO 2 furnished cables may be used on each matrix pair to create one 3 x 48 matrix (three inputs in total). The system also has one 1.6 A ground unit.