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The Keithley 7072-HV is a high voltage semiconductor matrix card designed to switch low-level, high-voltage, and high-impedance signals for semiconductor parametric tests on wafers and devices. It provides an 8 row by 12 column matrix configuration with three-lug triaxial connectors carrying Signal, Guard, and Chassis conductors, where the outer shell is connected to chassis for safety and noise shielding and the center conductor is fully surrounded by the inner conducting shield to provide fully guarded measurements with higher isolation and improved measurement speed and accuracy.
The 7072-HV is intended for semiconductor device and material characterization. The high voltage signals encountered in breakdown measurements or oxide integrity testing can be switched with this matrix card, with signals connected to the High V, Low I paths automatically isolated from the rest of the card. The two C-V paths may be used for measurement of capacitance voltage characteristics from DC to 1 MHz or for switching low currents with a common ground. Four additional high quality signal paths with less than 20 pA offset current provide for signal switching to 200 V.
Keithley Instruments was founded in 1946 in Cleveland, Ohio and became a long-established specialist in low-level and precision electrical measurement. Keithley was acquired by Danaher Corporation in 2010 and, following the 2016 spinoff of Danaher's industrial businesses, is now part of Fortive Corporation alongside Tektronix. Instruments bearing the Keithley brand continue to be developed and supported under that lineage.
| Specification | Value |
|---|---|
| Matrix Configuration | 8 rows by 12 columns |
| Connector Type | Three-lug triaxial (Signal, Guard, Chassis) |
| Contact Life (Cold Switching) | 107 closures |
| Contact Life (At Maximum Signal Level) | 105 closures |
| Path Resistance (per conductor) | <1Ω initial, <3.5Ω at end of contact life |
| Relay Settling Time | <15 ms |
| Insertion Loss (1 MHz, 50Ω source, 50Ω load) | 0.1 dB typical |
| EMC | Conforms to European Union Directive 89/336/EEC |
| Safety | Conforms to European Union Directive 73/23/EEC (meets EN61010-1/IEC 1010) |
| Operating Environment | 0° to 50°C, up to 35°C at 70% R.H. |
| Storage Environment | -25° to +65°C |
| Offset Current and Path Isolation Specs | 23°C, <60% R.H. |
| Per-Path Specification | Low Current (Rows A-B) | General Purpose (Rows C-F) | C-V (Rows G-H) |
|---|---|---|---|
| Crosspoint Configuration | 2-pole Form A | 2-pole Form A | 1-pole Form A, Common Guard |
| Offset Current | <1 pA | <20 pA | <20 pA |
| Path Isolation - Resistance | >1013 Ω | >1012 Ω | >1012 Ω |
| Path Isolation - Capacitance (nominal) | 0.4 pF | 1 pF | 0.6 pF |
| Crosstalk (1 MHz, 50Ω load, typical) | <-60 dB | <-40 dB | <-50 dB |
| 3dB Bandwidth (typical, 50Ω load) | 4 MHz | 8 MHz | 5 MHz |
| Max Signal Level (between any 2 pins or chassis) | 1300 V | 200 V | 200 V |
| Max Signal Level (between signal & guard; 1A carry/0.5A switched, 10VA peak resistive load) | 200 V | 200 V | 200 V |
| Contact Potential (Signal to Guard) | <50 μV | <20 μV | <40 μV |
Please review the Manufacturer's Data Sheet to verify published specifications. Feedback on this webpage is always welcome — please reach out to your Test Architect at any time for questions or concerns. Thank you, we truly appreciate you being our customer.
Model No
Keithley
Condition
New
Manufacturer
Keithley
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