# Keysight B1517A 100 V/0.1 A High Resolution Source/Monitor Unit (HRSMU) Module (Pre-Owned)

# Keysight B1517A 100 V/0.1 A High Resolution Source/Monitor Unit (HRSMU) Module (Pre-Owned)

## Key Features At A Glance

-   GPIB, USB, and LAN interfaces with VGA video output and Trigger In/Out for automated and ATE characterization
-   Modular 10-slot mainframe accepts configurable, upgradable source/monitor, capacitance, and pulse-generator units
-   Measurement coverage from 0.1 fA to 1 A and 0.5 µV to 200 V across the source/monitor unit range
-   Multi-frequency AC impedance measurement (C-V, C-f, C-t) across a 1 kHz to 5 MHz frequency range
-   Ultra-fast pulsed and transient IV including NBTI/PBTI and RTN at 200 MSa/s, 5 ns sampling (WGFMU)
-   High-voltage pulse generation to ±40 V with two- and three-level pulsing for memory evaluation (HV-SPGU)
-   EasyEXPERT group+ software with 300+ application tests on an embedded Windows 10 15-inch touch screen
-   Two ADC choices—high-resolution or high-speed—selectable per source/monitor unit

The Keysight B1500A Semiconductor Device Parameter Analyzer is an all-in-one parameter analyzer supporting current-voltage (IV), capacitance-voltage (CV), and pulsed/dynamic IV measurement in a single mainframe. It is designed for the electrical characterization and evaluation of devices, materials, semiconductors, and active or passive components, covering measurement needs from basic to cutting-edge applications. A modular architecture with ten available slots allows the instrument to be configured and later upgraded with additional measurement modules as characterization requirements change over time.

Through the EasyEXPERT group+ application library of over 300 ready-to-use application tests, the B1500A addresses characterization across a wide span of device types: CMOS transistors (Id-Vg, Id-Vd, Vth, breakdown, capacitance, QSCV), bipolar transistors (Gummel plot, hfe, Ic-Vc, diode), discrete devices, memory (butterfly curve, FORM, set-reset, endurance, PUND), power devices (pulsed Id-Vg/Id-Vd, SiC JEP183), and nano devices. A dedicated reliability suite covers NBTI/PBTI, charge pumping, electromigration, hot carrier injection, J-Ramp, and TDDB.

ValueTronics stocks the instruments it sells in its own 20,000-square-foot secure warehouse at 1675 Cambridge Drive in Elgin, Illinois. Every pre-owned unit is inspected and functionally verified in-house before it ships, while new units ship factory-sealed exactly as received from the manufacturer.

## Brand Heritage

Keysight Technologies traces its test-and-measurement heritage to Hewlett-Packard, which spun out its measurement business as Agilent Technologies in 1999. Agilent's electronic measurement division was then established as Keysight Technologies in 2014.

## Compare Other Models in This Series

The B1500A is built around a ten-slot modular mainframe that accepts a family of plug-in source/monitor units differing in voltage range, current range, and measurement resolution. The high power source/monitor unit (HPSMU), medium power source/monitor unit (MPSMU), high resolution source/monitor unit (HRSMU), and 50 µs pulse medium current source/monitor unit (MCSMU) can be combined in a single mainframe, subject to a total SMU power budget of 84 W.

Capacitance, pulse-generation, and ultra-fast IV capability are added through dedicated modules—the multi-frequency capacitance measurement unit (MFCMU), the high-voltage semiconductor pulse generator unit (HV-SPGU), and the waveform generator/fast measurement unit (WGFMU)—so a single instrument can be tailored to a specific characterization workload and reconfigured as needs change.

Each pre-owned model below is listed as its own dedicated product page with condition-matched pricing. Review the comparison table to match the source/monitor unit's voltage, current, and resolution specifications to your application before selecting.

As the mainframe of the configuration, the B1500A itself furnishes the ground unit (GNDU), the 15-inch touch-screen controller on embedded Windows 10, EasyEXPERT group+ software, and the ten module slots. The GNDU provides a 0 V ±100 µV output with up to ±4.2 A maximum sink current via a triaxial Kelvin connection.

The source/monitor units differ primarily in their voltage, current, and resolution envelopes. The HPSMU operates up to 200 V / 1 A with a minimum measurement resolution of 10 fA / 2 µV; the MPSMU and HRSMU both operate up to 100 V / 0.1 A, with the HRSMU reaching a finer 1 fA / 0.5 µV minimum resolution versus the MPSMU's 10 fA / 0.5 µV. The MCSMU operates up to 30 V / 1 A pulsed (0.1 A DC) and supports pulse measurement from a 50 µs pulse width with 2 µs resolution.

Both the MPSMU and HRSMU accept the optional ASU (Atto-Sense and Switch Unit) to reach 100 aA resolution and add IV/CV path switching, while the MCSMU adds an oscilloscope-view voltage/current waveform viewer. The comparison table below summarizes each unit's range, resolution, and pulse capability so the right module can be matched to the measurement task.

Model

Max Voltage

Max Current

Slots Occupied

**B1517A**

100 V

0.1 A

1

B1500A

—

—

10 (provides)

B1510A

200 V

1 A

2

B1511B

100 V

0.1 A

1

Additional differences in specifications beyond the few shown above are not listed here — see each model's full specifications below.

## Product Core & Specifications

Specification

Value

Voltage Range, Resolution, and Accuracy (High Resolution ADC)

±0.5 V (Force/Measure res; Force/Measure acc; Max current)

25 µV / 0.5 µV; ±(0.018% + 150 µV) / ±(0.01% + 120 µV); 100 mA

±2 V

100 µV / 2 µV; ±(0.018% + 400 µV) / ±(0.01% + 140 µV); 100 mA

±5 V

250 µV / 5 µV; ±(0.018% + 750 µV) / ±(0.009% + 250 µV); 100 mA

±20 V

1 mV / 20 µV; ±(0.018% + 3 mV) / ±(0.009% + 900 µV); 100 mA

±40 V

2 mV / 40 µV; ±(0.018% + 6 mV) / ±(0.01% + 1 mV); 100 mA (Vo≤20V), 50 mA (20-40V), 20 mA (40-100V)

±100 V

5 mV / 100 µV; ±(0.018% + 15 mV) / ±(0.012% + 2.5 mV)

Current Range, Resolution, and Accuracy (High Resolution ADC)

±1 pA (with ASU) (Force res / Measure eff / disp; Force acc / Measure acc; Max V)

1 fA / 100 aA / 1 aA; ±(0.9% + 15 fA) / ±(0.9% + 12 fA); 100 V

±10 pA

5 fA / 400 aA (w/ASU) or 1 fA (w/o ASU) / 10 aA; ±(0.46% + 30 fA + 10 aA x Vo) / ±(0.46% + 15 fA + 10 aA x Vo); 100 V

±100 pA

5 fA / 500 aA (w/ASU) or 2 fA (w/o ASU) / 100 aA; ±(0.3% + 100 fA + 100 aA x Vo) / ±(0.3% + 30 fA + 100 aA x Vo); 100 V

±1 nA

50 fA / 10 fA / 1 fA; ±(0.1% + 300 fA + 1 fA x Vo) / ±(0.1% + 200 fA + 1 fA x Vo); 100 V

±10 nA

500 fA / 10 fA; ±(0.1% + 3 pA + 10 fA x Vo) / ±(0.1% + 1 pA + 10 fA x Vo); 100 V

±100 nA

5 pA / 100 fA; ±(0.05% + 30 pA + 100 fA x Vo) / ±(0.05% + 20 pA + 100 fA x Vo); 100 V

±1 µA

50 pA / 1 pA; ±(0.05% + 300 pA + 1 pA x Vo) / ±(0.05% + 100 pA + 1 pA x Vo); 100 V

±10 µA

500 pA / 10 pA; ±(0.05% + 3 nA + 10 pA x Vo) / ±(0.04% + 2 nA + 10 pA x Vo); 100 V

±100 µA

5 nA / 100 pA; ±(0.035% + 15 nA + 100 pA x Vo) / ±(0.03% + 3 nA + 100 pA x Vo); 100 V

±1 mA

50 nA / 1 nA; ±(0.04% + 150 nA + 1 nA x Vo) / ±(0.03% + 60 nA + 1 nA x Vo); 100 V

±10 mA

500 nA / 10 nA; ±(0.04% + 1.5 µA + 10 nA x Vo) / ±(0.03% + 200 nA + 10 nA x Vo); 100 V

±100 mA

5 µA / 100 nA; ±(0.045% + 15 µA + 100 nA x Vo) / ±(0.04% + 6 µA + 100 nA x Vo); 100 V (Io≤20mA), 40 V (20-50mA), 20 V (50-100mA)

Power Consumption

Voltage source mode

20 x Ic (W) for 0.5/2/5/20 V; 40 x Ic (W) for 40 V; 100 x Ic (W) for 100 V

Supplemental Characteristics

Voltage/current compliance

Voltage 0 V to ±100 V; Current ±100 fA to ±100 mA (±10 fA to ±100 mA with ASU)

Voltage source output resistance (Force, non-Kelvin)

0.3 Ω

Voltage measurement input resistance

≥ 10^13 Ω

Maximum guard offset voltage

±3 mV (±4.2 mV with ASU at Iout ≤ 100 µA)

Maximum slew rate

0.2 V/µs

Output terminal/connection

Dual triaxial connector, Kelvin (remote sensing)

Pulse width / period

500 µs to 2 s width; 5 ms to 5 s period

> **Important:** Module configuration note: the total power consumption of all installed SMU modules cannot exceed 84 W.

> **Important:** Keysight is responsible for removing, installing, and replacing the B1500A modules. Contact your nearest Keysight to install and calibrate the B1500A modules.

> **Important:** Only one single-slot MFCMU can be installed per B1500A mainframe. Up to five single-slot HV-SPGUs and up to five single-slot WGFMUs can be installed per mainframe.

> **Important:** Maximum voltage between common and ground is less than or equal to +/-42 V.

> **Important:** The B1500A is a modular mainframe; plug-in measurement modules (SMU/CMU/SPGU/WGFMU) must be selected to perform measurements - see the Standard packages and Add-on packages in the Ordering Information.

> **Important:** Options A6J (ANSI Z540 calibration) and UK6 (commercial calibration certificate with test data) are available ONLY at the initial shipment.

> **Important:** When ordering Upgrade options, related test cables need to be ordered separately (refer to the B1500A Configuration Guide).

> **Important:** SMU voltage and current measurement accuracy can be affected by RF electromagnetic field strengths greater than 3 V/m (80 MHz to 1 GHz) and by induced RF field noise greater than 3 Vrms (150 kHz to 80 MHz), depending on instrument positioning and shielding.

> Recommended pairing: add the SCUU (SMU CMU Unify Unit) and GSWU (Guard Switch Unit) to automate switching between IV and CV measurements, or use a pair of ASUs for the same connection change.

## About this Pre-Owned unit

This pre-owned unit is inspected and functionally verified in-house before it ships and is backed by our pre-owned warranty. To confirm its exact condition, firmware revision, installed options, or included accessories for your application before ordering, contact our Test Architects.

-   Warranty included with every used unit.
-   Functional verification included.
-   Standard Calibration Upgrade Options: No Calibration Required, NIST Traceable, Z540.1 or ISO 17025 with Data, Z540.3 Guardbanding with Data.
-   Note that unnecessary accessories may not be included (contact Test Architect to confirm).

ValueTronics supplies both new and used test and measurement equipment. New units ship factory-sealed, exactly as received from the manufacturer; every used unit is inspected and functionally verified in-house at our 20,000 sq ft secure facility in Elgin, Illinois before it ships. Our Test Architects can help you select the condition, calibration, and configuration that fit your application.

**Please review the Manufacturer's Data Sheet to verify published specifications. Feedback on this webpage is always welcome — please reach out to your Test Architect at any time for questions or concerns. Thank you, we truly appreciate you being our customer.**

## Details

- **Price:** 0.0 USD
- **Vendor:** Keysight
- **Type:** Test Set
- **Tags:** 1517, Agilent, Agilent Keysight, B1517, B1517A, consignment-active, Inc., Keysight, Keysight Technologies, Mainframe, Manufacturers, Model 1517, Module, Other Equipment, Pre-Owned, product_manual_group_1, product_manual_group_2, Product_used, Updated Item Review

## Variants

| Variant | Price | Available |
|---------|-------|-----------|
| None | 0.00 USD | In stock |
| NIST Traceable | 0.00 USD | In stock |
| NIST Traceable with Full Data | 0.00 USD | In stock |
| ISO IEC 17025 Accredited | 0.00 USD | In stock |

## Images

- B1517A Agilent Keysight HP Module

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> Source: [ValueTronics](https://valuetronics.com/products/b1517a-agilent-module-used)
> Updated: 2026-06-02