# Keithley 6517A Electrometer/High Resistance Meter (Pre-Owned)

# Keithley 6517A Electrometer/High Resistance Meter (Pre-Owned)

## Key Features At A Glance

-   Measures resistances up to 10^16 Ω with built-in ±1 kV voltage source for leakage, breakdown, and resistivity testing
-   1 fA to 20 mA current measurement range with <20 µV burden voltage on the lowest current ranges
-   200 TΩ input impedance and <3 fA input bias current for near-ideal circuit loading on voltage and resistance measurements
-   Voltage measurements from 10 µV to 200 V and charge measurements from 10 fC to 2 µC
-   Up to 125 readings/second to internal buffer; 0.75 fA p-p noise on low current ranges
-   Unique alternating-polarity voltage reversal method for high resistance measurements on materials with background currents
-   Built-in type K thermocouple input plus optional humidity probe for temperature- and humidity-stamped readings
-   IEEE-488 (SCPI and DDC) and RS-232 interfaces; optional plug-in scanner cards for multi-channel measurements

The Keithley 6517A is a 5½-digit electrometer and high resistance meter designed for low-level current, high-impedance voltage, resistance, and charge measurements. The half-rack instrument combines a low-current input amplifier with a built-in ±1 kV voltage source in a single chassis, providing the source and measurement capability needed for insulation, leakage, and resistivity testing from one unit.

Applications listed on the datasheet include low-current and high-impedance voltage, resistance, and charge measurements in physics, optics, nanotechnology, and materials science research. The 6517A is positioned for solar cell work where low voltage burden matters, for high-resistance measurements on nanomaterials such as polymer-based nanowires, and for quality control, product engineering, and production test involving leakage, breakdown, and resistance testing. Volume and surface resistivity measurements on non-conductive materials are specifically highlighted as benefiting from the alternating-polarity voltage reversal method.

ValueTronics has been a specialist source for test and measurement equipment since 1992, operating from a 20,000 sq ft secure warehouse at 1675 Cambridge Drive in Elgin, Illinois. Every electrometer that passes through the facility is inspected and performance-tested by our technicians before it is offered for sale, and condition is documented on a per-unit basis rather than estimated from a model number. That hands-on process — distinct from drop-shippers and pass-through brokers — is what stands behind every 6517A we list.

## Brand Heritage

Keithley Instruments was founded in 1946 in Cleveland, Ohio, building a long reputation in low-level current, voltage, and resistance measurement. Keithley was acquired by Danaher Corporation in 2010 and, following Danaher's industrial spin-off in 2016, became part of Fortive Corporation alongside Tektronix. The Keithley brand and its electrometer product family — including the 6517A — continue under that ownership.

## Accessories Supplied

-   237-ALG-2 Low Noise Triax Cable, 3-slot Triax to Alligator Clips, 2m (6.6 ft)
-   8607 Safety High Voltage Dual Test Leads
-   6517-TP Thermocouple Bead Probe
-   CS-459 Interlock Connector

## Product Core & Specifications

Volts

Range

5½-Digit Resolution

Accuracy (1 Year) 18°–28°C ±(%rdg+counts)

Temperature Coefficient 0°–18°C & 28°–50°C ±(%rdg+counts)/°C

2 V

10 µV

0.025 + 4

0.003 + 2

20 V

100 µV

0.025 + 3

0.002 + 1

200 V

1 mV

0.06 + 3

0.002 + 1

NMRR: 60dB on 2V, 20V, >55dB on 200V, at 50Hz or 60Hz ±0.1%. CMRR: >120dB at DC, 50Hz or 60Hz. Input Impedance: >200TΩ in parallel with 20pF, <2pF guarded (10MΩ with zero check on). Small Signal Bandwidth at Preamp Output: Typically 100kHz (–3dB).

Amps

Range

5½-Digit Resolution

Accuracy (1 Year) 18°–28°C ±(%rdg+counts)

Temperature Coefficient 0°–18°C & 28°–50°C ±(%rdg+counts)/°C

20 pA

100 aA

1 + 30

0.1 + 5

200 pA

1 fA

1 + 5

0.1 + 1

2 nA

10 fA

0.2 + 30

0.1 + 2

20 nA

100 fA

0.2 + 5

0.03 + 1

200 nA

1 pA

0.2 + 5

0.03 + 1

2 µA

10 pA

0.1 + 10

0.005 + 2

20 µA

100 pA

0.1 + 5

0.005 + 1

200 µA

1 nA

0.1 + 5

0.005 + 1

2 mA

10 nA

0.1 + 10

0.008 + 2

20 mA

100 nA

0.1 + 5

0.008 + 1

Input Bias Current: <3fA at TCAL. Temperature coefficient = 0.5fA/°C. Input Bias Current Noise: <750aA p-p (capped input), 0.1Hz to 10Hz bandwidth, damping on. Digital filter = 40 readings. Input Voltage Burden at TCAL ±1°C: <20µV on 20pA, 2nA, 20nA, 2µA, 20µA ranges. <100µV on 200pA, 200nA, 200µA ranges. <2mV on 2mA range. <4mV on 20mA range. Temperature Coefficient of Input Voltage Burden: <10µV/°C on pA, nA, µA ranges. Preamp Settling Time (to 10% of final value): 2.5s typical on pA ranges damping off, 4s typical on pA ranges damping on, 15ms on nA ranges, 2ms on µA and mA ranges. NMRR: >95dB on pA, 60dB on nA, µA, and mA ranges at 50Hz or 60Hz ±0.1%.

Coulombs

Range

5½-Digit Resolution

Accuracy (1 Year) 18°–28°C ±(%rdg+counts)

Temperature Coefficient 0°–18°C & 28°–50°C ±(%rdg+counts)/°C

2 nC

10 fC

0.4 + 5

0.04 + 3

20 nC

100 fC

0.4 + 5

0.04 + 1

200 nC

1 pC

0.4 + 5

0.04 + 1

2 µC

10 pC

0.4 + 5

0.04 + 1

Input Bias Current: <4fA at TCAL. Temperature coefficient = 0.5fA/°C.

Ohms (Normal Method)

Range

5½-Digit Resolution

Accuracy (10–100% Range) 18°–28°C (1 Yr.) ±(% rdg+counts)

Temperature Coefficient (10–100% Range) 0°–18°C & 28°–50°C ±(% rdg+counts)

Auto V Source

Amps Range

2 MΩ

10 Ω

0.125 + 1

0.01 + 1

40 V

200 µA

20 MΩ

100 Ω

0.125 + 1

0.01 + 1

40 V

20 µA

200 MΩ

1 kΩ

0.15 + 1

0.015 + 1

40 V

2 µA

2 GΩ

10 kΩ

0.225 + 1

0.035 + 1

40 V

200 nA

20 GΩ

100 kΩ

0.225 + 1

0.035 + 1

40 V

20 nA

200 GΩ

1 MΩ

0.35 + 1

0.110 + 1

40 V

2 nA

2 TΩ

10 MΩ

0.35 + 1

0.110 + 1

400 V

2 nA

20 TΩ

100 MΩ

1.025 + 1

0.105 + 1

400 V

200 pA

200 TΩ

1 GΩ

1.15 + 1

0.125 + 1

400 V

20 pA

Voltage Source

Range

5½-Digit Resolution

Accuracy (1 Year) 18°–28°C ±(% setting + offset)

Temperature Coefficient 0°–18°C & 28°–50°C ±(% setting+offset)/°C

100 V

5 mV

0.15 + 10 mV

0.005 + 1 mV

1000 V

50 mV

0.15 + 100 mV

0.005 + 10 mV

Maximum Output Current: ±10mA, active current limit at <11.5mA for 100V range; ±1mA, active current limit at <1.15mA for 1000V range. Settling Time: <8ms to rated accuracy for 100V range; <50ms to rated accuracy for 1000V range. Noise: <150µV p-p from 0.1Hz to 10Hz for 100V range; <1.5mV p-p from 0.1Hz to 10Hz for 1000V range.

Temperature (Thermocouple)

Thermocouple Type

Range

Accuracy (1 Year) 18°–28°C ±(% rdg + °C)

K

–25°C to 150°C

± (0.3% + 1.5°C)

Humidity

Range

Accuracy (1 Year) 18°–28°C, ±(% rdg + % RH)

0–100%

± (0.3% + 0.5)

Humidity probe accuracy must be added. This is ±3% RH for Model 6517-RH, up to 65°C probe environment, not to exceed 85°C.

IEEE-488 Bus & RS-232

Implementation

SCPI (IEEE-488.2, SCPI-1993); DDC (IEEE-488.1)

Trigger to Reading Done

150ms typical, with external trigger

RS-232 Implementation

Supports SCPI 1991.0

Baud Rates

300, 600, 1200, 2400, 4800, 9600, 19.2k

**Important:** Maximum input: 250 V peak, DC to 60 Hz sine wave; the mA ranges are rated for 10 seconds per minute maximum. Maximum common-mode voltage is 500 V peak at the electrometer input and 750 V peak at the voltage source.Recommended pairing: the datasheet lists the Model 8009 Resistivity Test Fixture (guarded chamber with ASTM-standard stainless-steel electrodes and a lid interlock that disables the 6517A's voltage source when opened) for volume and surface resistivity measurements, and the optional Model 6524 High Resistance Measurement Software for the alternating-polarity test sequence.

## About this used unit

-   Warranty included
-   Functional verification included
-   Standard Calibration Upgrade Options: No Calibration Required, NIST Traceable, Z540.1 or ISO 17025 with Data, Z540.3 Guardbanding with Data.
-   Note that unnecessary accessories may not be included (contact Test Architect to confirm).

**Please review the Manufacturer's Data Sheet to verify published specifications. Feedback on this webpage is always welcome — please reach out to your Test Architect at any time for questions or concerns. Thank you, we truly appreciate you being our customer.**

## Details

- **Price:** 0.0 USD
- **Vendor:** Keithley
- **Type:** Electrometer
- **Tags:** Keithley, Manufacturers, Meters & DAQ, Other, product_manual_group_1, Product_used

## Variants

| Variant | Price | Available |
|---------|-------|-----------|
| None | 0.00 USD | In stock |
| NIST Traceable | 0.00 USD | In stock |
| NIST Traceable with Full Data | 0.00 USD | In stock |
| ISO IEC 17025 Accredited | 0.00 USD | In stock |

## Images

- 6517A Keithley Meter

---

> Source: [ValueTronics](https://valuetronics.com/products/6517a-keithley-meter-used)
> Updated: 2026-05-30